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Lattice Location of Phosphorus Atoms Implanted into Silicon

✍ Scribed by Dikiy, N. P. ;Matyash, P. P. ;Svetashev, P. A. ;Skakun, N. A. ;Vasilev, V. K. ;Zorin, E. I. ;Pavlov, P. V. ;Tetelbaum, D. U.

No coin nor oath required. For personal study only.

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