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Lattice location of 12B implanted in Si

✍ Scribed by T. Izumikawa; K. Matsuta; K. Sato; T. Miyake; M. Mihara; M. Fukuda; S.Y. Zhu; T. Minamisono

Book ID: 108239027
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 109 KB
Volume: 376-377
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2005.12.051

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