Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy

✍ Scribed by Williams, C. C.; Slinkman, J.; Hough, W. P.; Wickramasinghe, H. K.

• Book ID: 121376823
• Publisher: American Institute of Physics
• Year: 1989
• Tongue: English
• Weight: 555 KB
• Volume: 55
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.102312