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Laser‐induced reactions of platinum and other metal films with silicon

✍ Scribed by Poate, J. M.; Leamy, H. J.; Sheng, T. T.; Celler, G. K.

Book ID
111858792
Publisher
American Institute of Physics
Year
1978
Tongue
English
Weight
488 KB
Volume
33
Category
Article
ISSN
0003-6951

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The synthesis of silicon-based polymer films was studied by excimer laser (248 nm)-induced photo-reaction of phenylsilane and methylphenylsilane at reduced pressure. IR and UV-VIS results showed that the films were composed of Si-C network structures with phenyl rings.