✦ LIBER ✦

Laser-plasma extreme ultraviolet source at 6.7

✍ Scribed by Amano, Sho; Inoue, Tomoaki

Book ID: 118782479
Publisher: Springer
Year: 2012
Tongue: English
Weight: 317 KB
Volume: 108
Category: Article
ISSN: 0721-7269
DOI: 10.1007/s00340-012-5215-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Laser-produced plasma light source for e

Laser-produced plasma light source for extreme ultraviolet lithography

✍ Shields, H.; Fornaca, S.W.; Petach, M.B.; Orsini, R.A.; Moyer, R.H.; St Pierre, 📂 Article 📅 2002 🏛 IEEE 🌐 English ⚖ 681 KB

Improved emission uniformity from a liqu

Improved emission uniformity from a liquid-jet laser-plasma extreme-ultraviolet source

✍ Hansson, Björn A. M. ;Mosesson, Sofia ;Hertz, Hans M. 📂 Article 📅 2004 🏛 The Optical Society 🌐 English ⚖ 308 KB

Intense plasma discharge source at 13.5

Intense plasma discharge source at 13.5 nm for extreme-ultraviolet lithography

✍ Klosner, M. A.; Bender, H. A.; Silfvast, W. T.; Rocca, J. J. 📂 Article 📅 1997 🏛 Optical Society of America 🌐 English ⚖ 241 KB

Characterization of a laser-plasma extre

Characterization of a laser-plasma extreme-ultraviolet source using a rotating cryogenic Xe target

✍ S. Amano; K. Masuda; A. Shimoura; S. Miyamoto; T. Mochizuki 📂 Article 📅 2010 🏛 Springer 🌐 English ⚖ 831 KB

Pinch Plasma Radiation Sources for the E

Pinch Plasma Radiation Sources for the Extreme Ultraviolet

✍ W. Neff; K. Bergmann; O. Rosier; R. Lebert; L. Juschkin 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 986 KB

13.5 nm extreme ultraviolet emission fro

13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources

✍ Hayden, Paddy; Cummings, Anthony; Murphy, Nicola; OSullivan, Gerry; Sheridan, Pa 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 542 KB