Laser Microfabrication. Thin Film Processes and Lithography

✍ Scribed by Daniel J. Ehrlich and Jeffrey Y. Tsao (Eds.)

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Leaves: 584
• Category: Library

✦ Synopsis

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

✦ Table of Contents

Content:
Front Matter, Page iii
Copyright, Page iv
CONTRIBUTORS, Pages ix-x
PREFACE, Pages xi-xiii, J.Y. Tsao, D.J. Ehrlich
CHAPTER 1 - Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography, Pages 3-84, Y.S. LIU
CHAPTER 2 - Laser-Stimulated Molecular Processes on Surfaces, Pages 87-162, T.J. CHUANG
CHAPTER 3 - Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids, Pages 163-230, M. ROTHSCHILD
CHAPTER 4 - Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids, Pages 231-283, C.I.H. ASHBY, J.Y. TSAO
CHAPTER 5 - Transport and Kinetics, Pages 285-330, H.J. ZEIGER, D.J. EHRLICH, J.Y. TSAO
CHAPTER 6 - Laser Etching, Pages 333-383, JOHN J. RITSKO
CHAPTER 7 - Laser Deposition: Energetics and Chemical Kinetics, Pages 385-451, R.L. JACKSON, T.H. BAUM, T.T. KODAS, D.J. EHRLICH, G.W. TYNDALL, P.B. COMITA
CHAPTER 8 - Laser Deposition: Experimental Approaches, Pages 453-501, J. HAIGH, M.R. AYLETT
CHAPTER 9 - Epitaxy, Pages 503-538, S.J.C. IRVINE
CHAPTER 10 - Doping and Oxidation, Pages 539-580, IAN W. BOYD
Index, Pages 581-587