Laser-induced formation of titanium sili
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Chen, S. Y.; Shen, Z. X.; Chen, Z. D.; See, A. K.; Chan, L. H.; Zhang, T. J.; Te
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Article
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1999
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John Wiley and Sons
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English
⚖ 194 KB
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In this article, we report on the laser-induced formation of both C49 and C54 TiSi 2 films with fine grains using Q-switched Nd : YAG laser irradiation from Ti/Si samples. The films formed were characterized with micro-Raman spectroscopy, high-resolution transmission electron microscopy, energy-disp