Laser-induced melting and recrystallization of CVD grown polycrystalline Si/SiGe/Ge layers

✍ Scribed by P.I. Gaiduk; S.L. Prakopyeu; V.A. Zajkov; G.D. Ivlev; E.I. Gatskevich

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 409 KB
• Volume: 404
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/j.physb.2009.08.127