✦ LIBER ✦
Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing
✍ Scribed by S. Chiussi; F. Gontad; R. Rodríguez; C. Serra; J. Serra; B. León; T. Sulima; L. Höllt; I. Eisele
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 783 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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