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Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation

✍ Scribed by K. Okamoto; M. Shinohara; T. Yamanishi; S. Miyazaki; M. Hirose

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
398 KB
Volume
79-80
Category
Article
ISSN
0169-4332

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