Laser-induced diffusion of silicon atoms from Si3N4 films deposited onto GaAs

✍ Scribed by J.A. Akintunde

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 276 KB
• Volume: 113
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90389-4