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Laser-induced decomposition of 1,1-dichloro-1-silacyclobutane for gas-phase deposition of reactive solid polycarbosilane

✍ Scribed by M. Jakoubkova´; R. Fajgar; J. Tla´skal; J. Pola

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 849 KB
Volume: 466
Category: Article
ISSN: 0022-328X
DOI: 10.1016/0022-328x(94)88025-5

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