IR laser photosensitized decomposition of 1-methyl-1-silacyclobutane. Efficient gas-phase polymer deposition

✍ Scribed by Josef Pola; Václav Chvalovský; Elvira A. Volnina; Leonid E. Guselnikov

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 205 KB
• Volume: 341
• Category: Article
• ISSN: 0022-328X
• DOI: 10.1016/0022-328x(88)89114-9