✦ LIBER ✦

Laser induced backside dry etching of transparent materials

✍ Scribed by B. Hopp; Cs. Vass; T. Smausz

Book ID: 108060208
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 908 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.02.068

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