Laser-induced backside dry and wet etching of transparent materials using solid and molten tin as absorbers

Influence on the laser induced backside

Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation

✍ T. Smausz; T. Csizmadia; N. Kresz; Cs. Vass; Zs. Márton; B. Hopp 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 555 KB

Laser induced backside dry etching method (LIBDE) was developed -analogously to the well-known laser induced backside wet etching (LIBWE) technique -for the micromachining of transparent materials. In this procedure, the absorbing liquid applied during LIBWE was replaced with solid metal layers. Fus