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Laser diagnostics of a low-pressure hollow-cathode arc

✍ Scribed by P. Chall; E.K. Souw; J. Uhlenbusch


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
574 KB
Volume
34
Category
Article
ISSN
0022-4073

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Plasma Diagnostics in a Hollow Cathode a
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During the deposition of hard titaniumnitrid films the plasma conditions mere investigated with s movable Langmuir-probe in axial and radial directions systematically. The deposition took place in a hollow cathode arc evaporation equipment (HCAE). We measured the electron energy distribution functio