Plasma Diagnostics in a Hollow Cathode a
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A. Lunk; R. Basner
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Article
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1990
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John Wiley and Sons
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English
β 470 KB
During the deposition of hard titaniumnitrid films the plasma conditions mere investigated with s movable Langmuir-probe in axial and radial directions systematically. The deposition took place in a hollow cathode arc evaporation equipment (HCAE). We measured the electron energy distribution functio