Laser-Assisted Microtechnology

✍ Scribed by Professor Dr. Simeon M. Metev, Professor Dr. Vadim P. Veiko (auth.)

Publisher: Springer Berlin Heidelberg
Year: 1994
Tongue: English
Leaves: 282
Series: Springer Series in Materials Science 19
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

✦ Table of Contents

Front Matter....Pages I-XII
Introduction....Pages 1-5
Laser-Based Equipment for Microtechnology....Pages 6-33
Laser Micromachining of Thin Films....Pages 34-99
Local Laser-Induced Heat Treatment....Pages 100-131
Laser Melting and Microwelding....Pages 132-156
Laser Microshaping....Pages 157-186
Maskless Laser Micropatterning....Pages 187-227
Pulsed Laser-Plasma Deposition of Thin Films, and Film Structures....Pages 228-246
Back Matter....Pages 247-272

✦ Subjects

Electrical Engineering; Condensed Matter Physics

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