Laser-Assisted Microtechnology

✍ Scribed by Professor Dr. Simeon M. Metev, Professor Dr. Vadim P. Veiko (auth.)

Publisher: Springer-Verlag Berlin Heidelberg
Year: 1998
Tongue: English
Leaves: 282
Series: Springer Series in Materials Science 19
Edition: 2
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

✦ Table of Contents

Front Matter....Pages I-XII
Introduction....Pages 1-5
Laser- Based Equipment for Microtechnology....Pages 6-33
Laser Micromachining of Thin Films....Pages 34-99
Local Laser- Induced Heat Treatment....Pages 100-131
Laser Melting and Microwelding....Pages 132-156
Laser Microshaping....Pages 157-186
Maskless Laser Micropatterning....Pages 187-227
Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures....Pages 228-246
Back Matter....Pages 247-273

✦ Subjects

Nanotechnology;Operating Procedures, Materials Treatment;Surfaces and Interfaces, Thin Films;Optics, Optoelectronics, Plasmonics and Optical Devices;Characterization and Evaluation of Materials

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