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Laser annealing process of ITO thin films using beam shaping technology

โœ Scribed by Ming-Fei Chen; Keh-moh Lin; Yu-Sen Ho

Book ID
113831686
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
811 KB
Volume
50
Category
Article
ISSN
0143-8166

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Laser transfer of solโ€“gel ferroelectric
Laser transfer of solโ€“gel ferroelectric thin films using an ITO release layer
โœ A. Bansal; R. Hergert; G. Dou; R.V. Wright; D. Bhattacharyya; P.B. Kirby; E.M. Y ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 843 KB

A new laser transfer process is reported which allows damage-free transfer of ferroelectric thin films from a growth substrate directly to a target substrate. The thin film ferroelectric material is deposited on a fused silica growth substrate with a sacrificial release layer of ITO (indium tin oxid