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Laser Ablation Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) of ZnS1?xSex Semiconductor Materials

✍ Scribed by Gruhl, Susan ;Vogt, Carla ;Vogt, J�rgen ;Hotje, Urte ;Binnewies, Michael


Publisher
Springer-Verlag
Year
2005
Weight
304 KB
Volume
149
Category
Article
ISSN
0344-838X

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✍ Melody Bi; Antonio M Ruiz; Igor Gornushkin; Ben W Smith; James D Winefordner 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 304 KB

Laser ablation inductively coupled plasma mass spectrometry LA-ICP-MS was used for profiling patterned thin metal layers on a polymerrsilicon substrate. The parameters of the laser and ICP-MS operating conditions have been studied and optimized for this purpose. A new laser ablation chamber was desi