Profiling of patterned metal layers by l
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Melody Bi; Antonio M Ruiz; Igor Gornushkin; Ben W Smith; James D Winefordner
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Article
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2000
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Elsevier Science
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English
⚖ 304 KB
Laser ablation inductively coupled plasma mass spectrometry LA-ICP-MS was used for profiling patterned thin metal layers on a polymerrsilicon substrate. The parameters of the laser and ICP-MS operating conditions have been studied and optimized for this purpose. A new laser ablation chamber was desi