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Analysis and comparison of glass fragments by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) and ICP-MS

✍ Scribed by Tatiana Trejos; Shirly Montero; José R. Almirall


Publisher
Springer
Year
2003
Tongue
English
Weight
524 KB
Volume
376
Category
Article
ISSN
1618-2650

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Laser ablation inductively coupled plasma mass spectrometry LA-ICP-MS was used for profiling patterned thin metal layers on a polymerrsilicon substrate. The parameters of the laser and ICP-MS operating conditions have been studied and optimized for this purpose. A new laser ablation chamber was desi