Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography

✍ Scribed by Tian, Shibing; Xia, Xiaoxiang; Sun, Wangning; Li, Wuxia; Li, Junjie; Gu, Changzhi

• Book ID: 118005947
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 840 KB
• Volume: 22
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/22/39/395301