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Large deformation of thin films and layered flat panels: effects of gravity

✍ Scribed by A.E Giannakopoulos; I.A Blech; S Suresh


Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
294 KB
Volume
49
Category
Article
ISSN
1359-6454

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Atomic layer deposition of Cr2O3 thin fi
✍ Aivar Tarre; Jaan Aarik; Hugo MΓ€ndar; Ahti Niilisk; Rainer PΓ€rna; Raul Rammula; πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 616 KB

Atomic layer deposition of Cr 2 O 3 thin films from CrO 2 Cl 2 and CH 3 OH on amorphous SiO 2 and crystalline Si(1 0 0) and a-Al 2 O 3 (1 1 0 2) substrates was investigated, and properties of the films were ascertained. Self-limited growth with a rate of 0.05-0.1 nm/cycle was obtained at substrate t