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Large area RE-123 thin films for microwave applications grown by molecular beam epitaxy

✍ Scribed by J. Kurian; M. Naito; H. Sato; K. Cho


Book ID
103890082
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
325 KB
Volume
412-414
Category
Article
ISSN
0921-4534

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Large-area plan-view sample preparation
✍ Howard, David J. ;Paine, David C. ;Sacks, Robert N. 📂 Article 📅 1991 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 453 KB 👁 1 views

## Abstract We describe a method for plan‐view transmission electron microscopy (TEM) sample preparation that takes advantage of extreme etch‐rate selectivity in GaAs and AlAs in HF/H~2~O solutions. GaAs/In~x~Ga~1‐x~As/GaAs strained‐layer films (x = 0.05, 0.10, 0.19, 0.22) were chemically lifted of