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Large area, production MOCVD rotating disk reactor development and characteristics

✍ Scribed by G.S. Tompa; W.G. Breiland; A. Gurary; P.A. Zawadzki; G.H. Evans; P. Esherick; B. Kroll; R.A. Stall

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✍ G.S. Tompa; P.A. Zawadzki; K. Moy; M. McKee; A.G. Thompson; A.I. Gurary; E. Wola 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 660 KB