Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor

✍ Scribed by G.S. Tompa; P.A. Zawadzki; K. Moy; M. McKee; A.G. Thompson; A.I. Gurary; E. Wolak; P. Esherick; W.G. Breiland; G.H. Evans; N. Bulitka; J. Hennessy; C.J.L. Moore

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 660 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91122-3