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Large area high density plasma source by helical resonator arrays

✍ Scribed by Se-Geun Park; Beom-hoan O; Minyoung Sohn; Jinwoo Kim

Book ID
108422796
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
201 KB
Volume
133-134
Category
Article
ISSN
0257-8972

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