Large area deposition of 〈100〉-textured diamond films by a 60-kW microwave plasma CVD reactor

✍ Scribed by Ando, Yutaka; Yokota, Yoshihiro; Tachibana, Takeshi; Watanabe, Akihiko; Nishibayashi, Yoshiki; Kobashi, Koji; Hirao, Takashi; Oura, Kenjiro

• Book ID: 121698016
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 969 KB
• Volume: 11
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/s0925-9635(02)00018-3