Langmuir probe study of a magnetically enhanced RF plasma source at pressures below 0.1 Pa

✍ Scribed by Kousal, Jaroslav; Tichý, Milan; Šebek, Ondřej; Čechvala, Juraj; Biederman, Hynek

• Book ID: 111678028
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 368 KB
• Volume: 20
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/20/4/045018