An experimental study of plasma density determination by a cylindrical Langmuir probe at different pressures and magnetic fields in a cylindrical magnetron discharge in heavy rare gases

✍ Scribed by Passoth, E; Kudrna, P; Csambal, C; Behnke, J F; Tichý, M; Helbig, V

• Book ID: 120461555
• Publisher: Institute of Physics
• Year: 1997
• Tongue: English
• Weight: 307 KB
• Volume: 30
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/30/12/013