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Kinetics of the adsorption of O2 and of the desorption of SiO on Si(100): A molecular beam, XPS, and ISS study

✍ Scribed by Mark P. D'Evelyn; Mark M. Nelson; Thomas Engel

Publisher: Elsevier Science
Year: 1987
Weight: 43 KB
Volume: 186
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(87)91261-8

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