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Kinetics of strain relaxation through misfit dislocation formation in InAs/GaAs(111)A heteroepitaxy

โœ Scribed by Luis A. Zepeda-Ruiz; Brett Z. Nosho; Rodney I. Pelzel; W.Henry Weinberg; Dimitrios Maroudas


Book ID
117219994
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
137 KB
Volume
441
Category
Article
ISSN
0039-6028

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Combined effects of substrate compliance
โœ Luis A Zepeda-Ruiz; W Henry Weinberg; Dimitrios Maroudas ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 532 KB

A systematic theoretical analysis is presented of the combined effects of substrate compliance and film compositional grading on the relaxation of strain due to lattice mismatch in layer-by-layer semiconductor heteroepitaxy. The analysis is based on a combination of continuum elasticity theory and a