Kinetics of residual stress evolution in evaporated silicon dioxide films exposed to room air

✍ Scribed by Leplan, H.; Robic, J. Y.; Pauleau, Y.

• Book ID: 115511391
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 364 KB
• Volume: 79
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.361517