Kinetics of Oxygen Atom Production in R.F. Discharges of Moderate Pressures

✍ Scribed by F. Cramarossa; R. D'Agostino; E. Molinari

• Book ID: 102813190
• Publisher: John Wiley and Sons
• Year: 1978
• Tongue: English
• Weight: 711 KB
• Volume: 18
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.19780180503

✦ Synopsis

The dissociation of molecular oxygen has been studied in a radiofrequency plasma a t a pressure of 20 t o n in a flow system. The results show that the main channel for dissociation is Tie, electron excitation to the HERZBERQ and SCWMANN systems with negligible contribution of the channel involving the O,(aldg) metastable.

While oxygen atom recombination can be followed outside the discharge region, kinetic data show that recombination within the discharge is effectively suppressed, probably as a consequence of a recombination aasisted diemciation mechanism. This leads to high concentrations of 0-atoms a t the discharge exit.