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Kinetic modelling of atom production and thermalization in CCRF discharges in H 2

โœ Scribed by Panarese, Antonio; Diomede, Paola; Longo, Savino

Book ID
121343836
Publisher
Institute of Physics
Year
2013
Tongue
English
Weight
834 KB
Volume
22
Category
Article
ISSN
0963-0252

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