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Kinetics of dissolution of silicon in CrO3-HF-H2O solutions

✍ Scribed by Robert B. Heimann


Book ID
105078940
Publisher
Springer
Year
1984
Tongue
English
Weight
831 KB
Volume
19
Category
Article
ISSN
0022-2461

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πŸ“œ SIMILAR VOLUMES


Dissolution of silicon and junction deli
✍ T.L. Chu; J.R. Gavaler πŸ“‚ Article πŸ“… 1965 πŸ› Elsevier Science 🌐 English βš– 611 KB

The dissolution of single crystal silicon by aqueous solutions' of hydrofluoric acid and chromium (VI) oxide was studied as a function of the resistivity of silicon and the composition of the etchant . In the concentration range under study, the dissolution rate is dependent on the resistivity of th