Dissolution of silicon and junction deli
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T.L. Chu; J.R. Gavaler
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Article
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1965
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Elsevier Science
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English
β 611 KB
The dissolution of single crystal silicon by aqueous solutions' of hydrofluoric acid and chromium (VI) oxide was studied as a function of the resistivity of silicon and the composition of the etchant . In the concentration range under study, the dissolution rate is dependent on the resistivity of th