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Kinetics of {3 1 1} defect dissolution in silicon-on-insulator (SOI)

✍ Scribed by A.F Saavedra; K.S Jones; M.E Law; K.K Chan

No coin nor oath required. For personal study only.

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Kinetics of {3&#xa0;1&#xa0;1} defect dissolution in silicon-on-insulator (SOI)