Kinetics and mechanism of thermal oxidation of silicon with special emphasis on impurity effects
β Scribed by A.G. Revesz; R.J. Evans
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 225 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0038-1098
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