Kinetics and mechanism of thermal oxidation of silicon with special emphasis on impurity effects : A. G. Revesz and R. J. Evans. J. Phys. Chem. Solids30 (1969), p. 551

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 196 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90367-9