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Kinetic study of Si incorporation in InP by the hydride vapour phase epitaxy

โœ Scribed by A. Trassoudaine; O. Parillaud; E. Goumet; D. Castelluci; E. Gil-Lafon; R. Cadoret


Book ID
108342775
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
170 KB
Volume
192
Category
Article
ISSN
0022-0248

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