Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime

✍ Scribed by Shihab, M; Elgendy, A T; Korolov, I; Derzsi, A; Schulze, J; Eremin, D; Mussenbrock, T; Donkó, Z; Brinkmann, R P

• Book ID: 120926247
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 338 KB
• Volume: 22
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/22/5/055013