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Kinetic model of a low-pressure microwave discharge in O2-H2 including the effects of O- ions on the characteristics for plasma maintenance

✍ Scribed by Guerra, V; Loureiro, J

Book ID: 115528311
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 322 KB
Volume: 8
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/8/1/014

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