Kinetic and Mechanistic Studies of the Thermal Decomposition of Ti(N(CH 3 ) 2 ) 4 during Chemical Vapor Deposition by in Situ Molecular Beam Mass Spectrometry

✍ Scribed by Norton, Edward T.; Amato-Wierda, Carmela

• Book ID: 127253774
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 90 KB
• Volume: 13
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm0104708