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Key reliability issues for copper integration in damascene architecture

✍ Scribed by R Gonella

Book ID: 104305547
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 198 KB
Volume: 55
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(00)00454-8

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