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Jet flows during sublimation in a vacuum by the method of schlieren photography

✍ Scribed by D. P. Lebedev; V. V. Uvarov


Publisher
Springer US
Year
1981
Tongue
English
Weight
475 KB
Volume
40
Category
Article
ISSN
1573-871X

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Epitaxial growth of silicon carbide laye
✍ Dr. Yu. A. Vodakov; E. N. Mokhov; M. G. Ramm; A. D. Roenkov πŸ“‚ Article πŸ“… 1979 πŸ› John Wiley and Sons 🌐 English βš– 826 KB

The growth kinetics of Sic epitaxial layers has been investigated by sublimation sandwichmethod in vacuum a t temperature range from 1600 to 2100 O C . The limiting stages of the crystallization process have been determined. Silicon deficit in the growth cell was shown to result in the great retardi