[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Ghost exposure of chemically amplified resist caused by acids generated in environmental air with KrF exposure

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Progress in ArF single-layer resists

✍ Takechi, S.; Otoguro, A.; Arita, T. 📂 Article 📅 1999 🏛 Japan Society of Applied Physics ⚖ 115 KB

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Coulomb interaction effect correction in e-beam block exposure lithography

✍ Takahashi, K.; Nara, Y.; Manabe, Y.; Hoshino, H.; Machida, Y. 📂 Article 📅 1999 🏛 Japan Society of Applied Physics ⚖ 141 KB

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - First operation of compact SR ring "AURORA-2S"

✍ Hori, T. 📂 Article 📅 1999 🏛 Japan Society of Applied Physics ⚖ 249 KB

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Optimization of sampling method for overlay and alignment accuracy improvement

✍ Jinseog Hong, ; Junghyeon Lee, ; Joonsoo Park, ; Hanku Cho, ; Jootae Moon, 📂 Article 📅 1999 🏛 Japan Society of Applied Physics ⚖ 134 KB

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Spatial distribution of mask-scattered electrons through scattering stencil mask

✍ Yamashita, H.; Manako, S.; Nomura, E.; Nakajima, K.; Nozue, H. 📂 Article 📅 1999 🏛 Japan Society of Applied Physics ⚖ 132 KB

[Japan Society of Applied Physics Digest

[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Development of highly accurate X-ray mask with high-density patterns

✍ Shimada, M.; Tuchizawa, T.; Uchiyama, S.; Okubo, T.; Itabashi, S.; Okada, I.; On 📂 Article 📅 1999 🏛 Japan Society of Applied Physics 🌐 Japanese ⚖ 189 KB