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[Japan Society of Applied Physics Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan (6-8 July 1999)] Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Development of highly accurate X-ray mask with high-density patterns

✍ Scribed by Shimada, M.; Tuchizawa, T.; Uchiyama, S.; Okubo, T.; Itabashi, S.; Okada, I.; Ono, T.; Oda, M.

Book ID: 126697738
Publisher: Japan Society of Applied Physics
Year: 1999
Tongue: Japanese
Weight: 189 KB
Edition: 1999
Category: Article
ISBN-13: 9784930813978
DOI: 10.1109/IMNC.1999.797558

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