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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference - Shimane, Japan (31 Oct.-2 Nov. 2001)] Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) - Etching of spin-on-glass films by synchrotron radiation

✍ Scribed by Taniguchi, J.; Kanda, K.; Matsui, S.; Tokunaga, M.; Miyamoto, I.

Book ID: 120630572
Publisher: Japan Soc. Appl. Phys
Year: 2001
Tongue: Japanese
Weight: 127 KB
Category: Article
ISBN-13: 9784891140175
DOI: 10.1109/IMNC.2001.984163

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