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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference - Shimane, Japan (31 Oct.-2 Nov. 2001)] Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) - Ion beam lithography using membrane masks

✍ Scribed by Kim, Y.S.; Hong, W.; Woo, H.J.; Choi, H.W.; Kim, K.D.; Lee, S.

Book ID: 126671455
Publisher: Japan Soc. Appl. Phys
Year: 2001
Weight: 295 KB
Category: Article
ISBN-13: 9784891140175
DOI: 10.1109/IMNC.2001.984133

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