๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Isotopically selective CVD of silicon by IRMPD of Si2F6

โœ Scribed by S. Arai; M. Kawai; H. Morimoto; K. Tanaka; H. Seyama; M. Soma

Publisher
Springer
Year
1988
Tongue
English
Weight
268 KB
Volume
47
Category
Article
ISSN
0721-7269

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Carbon-13 Separation by IRMPD of mixture
Carbon-13 Separation by IRMPD of mixtures of C2F6 and Br2
โœ S. Arai; T. Watanabe; Y. Ishikawa; T. Oyama; O. Hayashi; T. Ishii ๐Ÿ“‚ Article ๐Ÿ“… 1984 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 366 KB

The infrared multiple-photon decomposition of mistures of CzPe and Br2 has been examined as functions of various experimental parameters. Carbon-13 was found to be enriched in the main product CFsBr; the maximum enrichment factor was 35\_ The combination of this process with the IRMPD of CFsBr provi

29Si and 30Si enrichment by IR MPD of Si
29Si and 30Si enrichment by IR MPD of Si2F6
โœ M. Kamioka; S. Arai; Y. Ishikawa; S. Isomura; N. Takamiya ๐Ÿ“‚ Article ๐Ÿ“… 1985 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 256 KB

Infrared muhiple-phomn decomposition of SI,F, ha been srudwd ns a function of irrJdianon \rataumbsr u\nng n collimated pulsed barn from n CO, TEA laser. The main dscompoG[ion producl SIF, U.IS found ICI be rnrlched wi[h '%I and -wS~. For example. SiF, conrained 6% '%I and 46% wS~ in the lrradlallon